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Patent Searching and Data


Title:
RADIAL POWER MEGASONIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO2003047306
Kind Code:
A3
Abstract:
A transducer (90) comprising an acoustic energy generating means (24) and a resonator (14). The acoustic energy generating means generates acoustic energy in the frequency range of 0.4 to 2.0 MHz, and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate (103) in a given time period when the substrate (103) is rotating. The acoustic energy generating means (24) has a surface area that is less than the surface area of the substrate (103),and may comprise a wedge shaped piezoelectric crystal (24). A resonator (14) is attached to the acoustic energy generating means (24) for transmitting the acoustic energy to the substrate (103).

Inventors:
BECK MARK J
VENNERBECK RICHARD B
LILLARD RAYMOND Y
LIEBSCHER ERIC G
Application Number:
PCT/US2002/035044
Publication Date:
October 30, 2003
Filing Date:
November 01, 2002
Export Citation:
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Assignee:
PRODUCT SYSTEMS INC (US)
International Classes:
G10K11/32; H01L21/304; B08B3/12; H01L25/00; H04R1/34; H04R23/00; (IPC1-7): H01L41/09; H01L41/04
Foreign References:
US6039059A2000-03-21
US6464561B22002-10-15
US6313567B12001-11-06
US20020153806A12002-10-24
US2485722A1949-10-25
JPH01209962A1989-08-23
Other References:
See also references of EP 1449268A4
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