Title:
RADIATION BEAM EXPANDER
Document Type and Number:
WIPO Patent Application WO/2016/150612
Kind Code:
A3
Abstract:
A radiation beam expander comprises a diverging optic and a converging optic. The diverging optic comprises one or more mirrors for receiving a radiation beam and increasing a divergence of the radiation beam. The converging optic comprising one or more mirrors arranged to receive the radiation beam and to reduce the divergence of the radiation beam. At least one of the one or more mirrors of the diverging optic and/or the converging optic is provided with an actuator arranged to control a curvature of the mirror. This allows the optical power of the diverging optic and/or the converging optic to be controlled independently of the angle at which a radiation beam is incident on the mirrors of said diverging optic or the converging optic. This allows the radiation beam expander to control the divergence of the radiation beam after the diverging and converging optics independently of the orientations and relative positions of the mirrors of the diverging and converging optics.
Inventors:
NIENHUYS HAN-KWANG (NL)
Application Number:
PCT/EP2016/052818
Publication Date:
October 27, 2016
Filing Date:
February 10, 2016
Export Citation:
Assignee:
ASML NETHERLANDS BV (NL)
International Classes:
G02B19/00; G02B5/10; G02B17/08; G02B26/08; G03F7/20
Foreign References:
| US20130037693A1 | 2013-02-14 | |||
| US20060092393A1 | 2006-05-04 | |||
| US5142132A | 1992-08-25 | |||
| US20150022799A1 | 2015-01-22 | |||
| US20080170216A1 | 2008-07-17 | |||
| EP1170635A2 | 2002-01-09 | |||
| US20050128483A1 | 2005-06-16 |
Attorney, Agent or Firm:
SLENDERS, Peter (5500 AH Veldhoven, NL)
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