Title:
RADIATION DETECTING UNIT AND RADIATION INSPECTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/066616
Kind Code:
A1
Abstract:
A detecting board (22) is provided with a wiring board (24), a semiconductor detecting
element (25) firmly fixed on the upper plane of the wiring board (24) for detecting
radiation and a spacer (28) firmly fixed on the upper plane of the wiring board
(24), and a plurality of detecting boards are stacked and fixed. On each of the
detecting boards (22), the semiconductor detecting element (25) and the spacer
(28) are arranged to have a prescribed positional relationship. Furthermore,
the detecting boards (22) are stacked by being aligned by the spacers (28) on an
X-Y plane, and are fixed by fixing members (23a, 23b). The spacer (28) is provided
with a step section (28e) so that the lower plane of the wiring board (24) is not
brought into contact with the spacer (28) under the lower plane, and in the vertical
direction, the spacers (28) are positioned by being brought into contact with
each other.
Inventors:
UKITA AKIHIRO (JP)
Application Number:
PCT/JP2006/324174
Publication Date:
June 14, 2007
Filing Date:
December 04, 2006
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
UKITA AKIHIRO (JP)
UKITA AKIHIRO (JP)
International Classes:
G01T1/24; G01T1/161; H01L31/09
Foreign References:
| JP2005201671A | 2005-07-28 | |||
| JPS6270785A | 1987-04-01 | |||
| JP2003043339A | 2003-02-13 | |||
| JPH0541196A | 1993-02-19 | |||
| JPH03137606A | 1991-06-12 |
Other References:
See also references of EP 1959274A4
Attorney, Agent or Firm:
ITOH, Tadahiko (Yebisu Garden Place Tower 20-3, Ebisu 4-Chom, Shibuya-Ku Tokyo 32, JP)
Download PDF: