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Patent Searching and Data


Title:
RADIATION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/110260
Kind Code:
A1
Abstract:
Provided is a radiation detection device whereby a sample can be confirmed with good precision via mirror. A radiation detection device is provided with radiation optical elements (11a-11d) for throttling radiation radiated to a sample, a detection part for detecting radiation generated by irradiation of the sample by radiation, a mirror (12) disposed facing the sample, and a retaining part (10a) for retaining the radiation optical elements (11a-11d) and the mirror (12). The retaining part (10a) can move in two intersecting directions in a plane intersecting with the irradiation direction of radiation radiated to the sample. The retaining part (10a) also retains a plurality of radiation optical elements (11a, 11d) having different emission diameters of radiation, and retains the mirror (12) and the radiation optical element (11a) having the smallest emission diameter so as to be aligned in one of the two directions in which movement is possible.

Inventors:
NATSUME YOSHITAKA (JP)
HASE TOMOHARU (JP)
Application Number:
PCT/JP2017/042409
Publication Date:
June 21, 2018
Filing Date:
November 27, 2017
Export Citation:
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Assignee:
HORIBA LTD (JP)
International Classes:
G01N23/223
Foreign References:
JP2002107134A2002-04-10
JP2004279355A2004-10-07
JPH06258061A1994-09-16
JP2003207467A2003-07-25
JP2007292476A2007-11-08
JPH06273147A1994-09-30
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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