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Title:
RADIATION GENERATING APPARATUS AND RADIATION GENERATING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/051338
Kind Code:
A1
Abstract:
This radiation generating apparatus is provided with: a fuel storage unit (20) which stores a mixed liquid (61); a pressure application unit (10) which applies a pressure to the mixed liquid (61); a jet formation unit (30) which forms a jet (61a) of the mixed liquid (61); a reaction unit (44) in which the jet (61a) of the mixed liquid (61) is formed; a pressure adjustment unit (41) which sets the pressure in the reaction unit (44) lower than the internal pressure in the jet formation unit (30); and a light source unit (45) which irradiates a particle group (63a) with laser light (L1). A fuel particle (63) generates desired radiation when irradiated with the laser light (L1). In the reaction unit (44a), a plurality of fuel particles (63) move along the direction of the jet (61a) and a liquefied gas and a liquid move in the direction away from the plurality of fuel particles (63), thereby forming the particle group (63a).

Inventors:
WATARI TAKESHI (JP)
NISHIHARA KATSUNOBU (JP)
TAKAGI MASARU (JP)
SATOH NAKAHIRO (JP)
KAWASHIMA TOSHIYUKI (JP)
KAN HIROFUMI (JP)
Application Number:
PCT/JP2012/070227
Publication Date:
April 11, 2013
Filing Date:
August 08, 2012
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
WATARI TAKESHI (JP)
NISHIHARA KATSUNOBU (JP)
TAKAGI MASARU (JP)
SATOH NAKAHIRO (JP)
KAWASHIMA TOSHIYUKI (JP)
KAN HIROFUMI (JP)
International Classes:
G21K1/00; G21B1/03; G21K5/02; H05G2/00
Foreign References:
JP2008511110A2008-04-10
JP2003337200A2003-11-28
JP2007200615A2007-08-09
JP2002514740A2002-05-21
Other References:
See also references of EP 2747090A4
JAPANESE JOURNAL OF POLYMER SCIENCE AND TECHNOLOGY, vol. 64, 2007, pages 147 - 154
JAPANESE JOURNAL OF POLYMER SCIENCE AND TECHNOLOGY, vol. 48, 1991, pages 41 - 45
J. VAC. SCI. TECHNOL., vol. A10, 1992, pages 239 - 242
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
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Claims:



 
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