Title:
RADIATION RESISTING MOLECULAR PUMP
Document Type and Number:
WIPO Patent Application WO/2005/124158
Kind Code:
A1
Abstract:
A radiation resisting molecular pump with excellent durability against radiation and high temperature baking capable of preventing the insulation of electric wire used in an internal wiring from being deteriorated even when used in those places such as an accelerator and a fusion reactor where strong radiation is radiated. The turbo molecular pump (1) comprises, in its casing, radial magnetic bearings (12) and (13) and a thrust magnetic bearing (14) pivotally supporting a rotating shaft (5) directly fixed to a rotor (4) and an induction motor (11) for driving the rotating shaft (5). The magnetic bearings (12), (13), and (14) and the internal wiring (16) connected to the induction motor (11) are covered with a coating material formed of a polyether ether ketone.
Inventors:
WADA KAORU (JP)
NAKAYASU TATSUO (JP)
NAKAYASU TATSUO (JP)
Application Number:
PCT/JP2005/011017
Publication Date:
December 29, 2005
Filing Date:
June 16, 2005
Export Citation:
Assignee:
OSAKA VACUUM LTD (JP)
WADA KAORU (JP)
NAKAYASU TATSUO (JP)
WADA KAORU (JP)
NAKAYASU TATSUO (JP)
International Classes:
F04D19/04; F04D29/02; H02K3/30; (IPC1-7): F04D19/04; F04D29/02; H02K3/30
Foreign References:
| JP3510007B2 | 2004-03-22 | |||
| JPH0817258A | 1996-01-19 | |||
| JPH05144328A | 1993-06-11 | |||
| JPH10103288A | 1998-04-21 | |||
| JPH06323984A | 1994-11-25 | |||
| JPS5490296A | 1979-07-17 | |||
| JP3087896B1 | 2000-09-11 | |||
| JPH0414793U | 1992-02-06 |
Attorney, Agent or Firm:
Koyama, Teruaki (16-8 Nihonbashi-kodenmach, Chuo-ku Tokyo, JP)
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