Title:
RADIATION SHIELD
Document Type and Number:
WIPO Patent Application WO2005046920
Kind Code:
A3
Abstract:
As part of a system for processing a workpiece (122) by applying a controlled heat to the workpiece, a heating arrangement includes an array of spaced apart heating elements (102) for use in a confronting relationship with the workpiece to subject the workpiece to a direct radiation that is produced. A radiation shield (200) includes a plurality of members (207) supported for movement between (i) retracted positions, which allow the direct radiation to reach the workpiece, and (ii) extended positions, in which the plurality of members cooperate in way which serves to at least partially block the direct radiation from reaching the workpiece and to absorb radiation emitted and reflected by the workpiece and thereby achieve greater control of the time-temperature profile than previously obtainable. At least certain ones of the members (207) move between adjacent ones of the heating elements (102) in moving those certain members between the retracted and extended positions. Tubular, curved and plate-like member configurations can be used.
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Inventors:
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
TIMANS PAUL J (US)
LEMA FRANK ALLEN (US)
LEE YOUNG JAI (US)
TIMANS PAUL J (US)
LEMA FRANK ALLEN (US)
Application Number:
PCT/US2004/037685
Publication Date:
October 20, 2005
Filing Date:
November 10, 2004
Export Citation:
Assignee:
MATTSON TECH INC (US)
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
TIMANS PAUL J (US)
LEMA FRANK ALLEN (US)
DEVINE DANIEL J (US)
LEE YOUNG JAI (US)
TIMANS PAUL J (US)
LEMA FRANK ALLEN (US)
International Classes:
F27B5/14; F27B17/00; F27D5/00; F27D11/00; H01L21/00; B23H; (IPC1-7): F27D11/00
Foreign References:
US6054684A | 2000-04-25 |
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