Title:
RADIATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/139055
Kind Code:
A3
Abstract:
A radiation system comprising a beam splitting apparatus configured to receive a main radiation beam and split the main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.
Inventors:
NIENHUYS HAN-KWANG (NL)
BOGAART ERIK WILLEM (NL)
DONKER RILPHO LUDOVICUS (NL)
KRUIZINGA BORGERT (NL)
LOOPSTRA ERIK ROELOF (NL)
BOTMA HAKO (NL)
DE VRIES GOSSE CHARLES (NL)
FRIJNS OLAV WALDEMAR VLADIMIR (NL)
BASELMANS JOHANNES JACOBUS MATHEUS (NL)
BOGAART ERIK WILLEM (NL)
DONKER RILPHO LUDOVICUS (NL)
KRUIZINGA BORGERT (NL)
LOOPSTRA ERIK ROELOF (NL)
BOTMA HAKO (NL)
DE VRIES GOSSE CHARLES (NL)
FRIJNS OLAV WALDEMAR VLADIMIR (NL)
BASELMANS JOHANNES JACOBUS MATHEUS (NL)
Application Number:
PCT/EP2016/053216
Publication Date:
October 27, 2016
Filing Date:
February 16, 2016
Export Citation:
Assignee:
ASML NETHERLANDS BV (NL)
International Classes:
G02B5/02; G03F7/20
Domestic Patent References:
| WO2014139815A1 | 2014-09-18 | |||
| WO2014202585A2 | 2014-12-24 |
Foreign References:
| EP1058156A2 | 2000-12-06 | |||
| DE102012204142A1 | 2013-03-21 | |||
| DE102013223808A1 | 2014-12-11 | |||
| US20070090278A1 | 2007-04-26 | |||
| US20140362361A1 | 2014-12-11 | |||
| US20100053785A1 | 2010-03-04 | |||
| US20080193721A1 | 2008-08-14 | |||
| DE102013202949A1 | 2014-05-08 | |||
| US20100103676A1 | 2010-04-29 | |||
| DE102012210256A1 | 2013-06-06 | |||
| EP0627667A1 | 1994-12-07 |
Attorney, Agent or Firm:
SLENDERS, Peter (5500 AH Veldhoven, NL)
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