Title:
RADIATION TARGET AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/111255
Kind Code:
A9
Abstract:
Provided are a radiation discharge target and a radiation emission device whereby adhesion of a layered radiation target is stabilized, output fluctuations associated with operating temperature histories are alleviated, and a stable radiation emission characteristic is present. This radiation target comprises a support substrate, a target layer which emits radiation by illumination with an electron beam, and an intermediate layer which is located between the support substrate and the target layer. The intermediate layer is 1µm or less in thickness and has titanium as a primary constituent. At least a portion of the titanium exhibits a β phase at 400°C or below.
Inventors:
OGURA TAKAO (JP)
ITO NOBUHIRO (JP)
ITO NOBUHIRO (JP)
Application Number:
PCT/JP2012/051297
Publication Date:
June 19, 2014
Filing Date:
January 23, 2012
Export Citation:
Assignee:
CANON KK (JP)
OGURA TAKAO (JP)
ITO NOBUHIRO (JP)
OGURA TAKAO (JP)
ITO NOBUHIRO (JP)
International Classes:
H01J35/08; C22C14/00; H01J35/18
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
Takuma Abe (JP)
Takuma Abe (JP)
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