Title:
RADIATION TEMPERATURE MEASUREMENT DEVICE AND RADIATION TEMPERATURE MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2022/215417
Kind Code:
A1
Abstract:
This radiation temperature measurement device 3 for accurately measuring the temperature of an object W under measurement comprises two infrared detection units 4a, 4b that each detect a different infrared wavelength band, a spectral characteristic data storage unit 7 for storing spectral characteristic data indicating the transmittance and reflectance of each object W under measurement, and a temperature calculation unit 6 for calculating the temperature of each object W under measurement on the basis of the amounts of infrared light detected by the two infrared detection units 4a, 4b and the transmittance and reflectance of each object W under measurement.
Inventors:
FUJINO SHO (JP)
TOMINAGA KOJI (JP)
TOMINAGA KOJI (JP)
Application Number:
PCT/JP2022/010056
Publication Date:
October 13, 2022
Filing Date:
March 08, 2022
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
G01J5/00; G01J5/60
Foreign References:
| US4956538A | 1990-09-11 | |||
| JP2002122480A | 2002-04-26 | |||
| JP2009500851A | 2009-01-08 | |||
| JP2001056253A | 2001-02-27 | |||
| JP2017090351A | 2017-05-25 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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