Title:
RADIATION-TOLERANT THREE-DIMENSIONAL UNIT MOSFET HARDENED AGAINST SINGLE EVENT EFFECT AND TOTAL IONIZING DOSE EFFECT
Document Type and Number:
WIPO Patent Application WO/2019/194380
Kind Code:
A1
Abstract:
The present invention relates to a radiation-tolerant three-dimensional unit MOSFET, and proposes a radiation-tolerant three-dimensional unit MOSFET to which at least one of a dummy drain (DD), an n-well (NW) layer, a deep n-well (DNW) layer, and a p+ layer is selectively added to minimize a total event effect and a single event effect.
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Inventors:
LEE HEE CHUL (KR)
ROH YOUNG TAK (KR)
ROH YOUNG TAK (KR)
Application Number:
PCT/KR2018/012031
Publication Date:
October 10, 2019
Filing Date:
October 12, 2018
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
H01L29/78; H01L21/8234
Foreign References:
US20160027911A1 | 2016-01-28 | |||
KR20150002029A | 2015-01-07 | |||
US8497171B1 | 2013-07-30 | |||
KR20140050700A | 2014-04-29 |
Other References:
CHAO ZHANG: "Research on single-event transient mechanism in a novel SOI CMOS technology", IEICE ELECTRONICS EXPRESS, 3 September 2014 (2014-09-03), pages 1 - 10, XP055645644
Attorney, Agent or Firm:
KIM, Jeong Hoon (KR)
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