Title:
RARE EARTH THIN FILM MAGNET AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2017/179422
Kind Code:
A1
Abstract:
A rare earth thin film magnet which contains Nd, Fe and B as essential components, and which is characterized in that: an Nd-Fe-B base film having a composition in which the Nd content is higher than that of the stoichiometric composition is formed on an Si substrate that is provided with an oxide film on the surface; and a film (a nano composite film) having a structure in which α-Fe phases and Nd2Fe14B are alternately arranged and three-dimensionally dispersed is provided on the base film. The objective of the present invention is to provide a rare earth thin film magnet which has good magnetic characteristics, while being less susceptible to the occurrence of film separation or substrate breakage.
Inventors:
NAKANO MASAKI (JP)
FUKUNAGA HIROTOSHI (JP)
YANAI TAKESHI (JP)
SAWATARI HIRONOBU (JP)
FUKUNAGA HIROTOSHI (JP)
YANAI TAKESHI (JP)
SAWATARI HIRONOBU (JP)
Application Number:
PCT/JP2017/012787
Publication Date:
October 19, 2017
Filing Date:
March 29, 2017
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
H01F10/14; C22C38/00; C23C14/06; C23C14/28; C23C14/58; H01F1/057; H01F41/02; H01F41/20
Domestic Patent References:
| WO2013103132A1 | 2013-07-11 |
Foreign References:
| JP2012235003A | 2012-11-29 | |||
| JP2015230944A | 2015-12-21 |
Other References:
M.NAKANO ET AL.: "Nd-Fe-B Film Magnets With Thickness Above 100 pm Deposited on Si Substrates", IEEE TRANSACTIONS ON MAGNETICS, vol. 51, no. 11, 22 October 2015 (2015-10-22), pages 1 - 4, XP011587502
MASAKI NAKANO ET AL.: "Preparation and Magnetic Properties of Thick Film Magnets", JOURNAL OF THE JAPAN INSTITUTE OF METALS, vol. 76, no. l, 1 January 2012 (2012-01-01), pages 59 - 64, XP055429146
MASAKI NAKANO ET AL.: "Preparation and Magnetic Properties of Thick Film Magnets", JOURNAL OF THE JAPAN INSTITUTE OF METALS, vol. 76, no. l, 1 January 2012 (2012-01-01), pages 59 - 64, XP055429146
Attorney, Agent or Firm:
OGOSHI Isamu et al. (JP)
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