Title:
REACTION APPARATUS FOR PRODUCING TRICHLOROSILANE GAS
Document Type and Number:
WIPO Patent Application WO/2010/123232
Kind Code:
A2
Abstract:
The present invention relates to a reaction apparatus for producing trichlorosilane gas. The reaction apparatus comprises: a cylindrical casing which receives silicon tetrachloride gas and hydrogen gas through the lower portion thereof and guides the received gas to the upper portion thereof; a heater installed in the casing to supply heat into the casing; an induction heating unit for induction-heating the heater; a heating medium which is injected into the casing and which is constituted by inert inorganic particles; and a plurality of nozzles arranged in the lower portion of the casing to spray the silicon tetrachloride gas and the hydrogen gas into the casing. The thus-configured reaction apparatus for producing trichlorosilane gas according to the present invention enables the silicon tetrachloride gas and the hydrogen gas to be remarkably uniformly mixed, and in particular has superior heat transfer efficiency, improved overall operating efficiency, and low operating costs. The reaction apparatus of the present invention minimizes the temperature of the heater relative to the mixture gas of the silicon tetrachloride gas and the hydrogen gas to prevent a side reaction of the hydrogen gas with the heater, thereby producing high purity trichlorosilane gas.
Inventors:
KWON, Young Jin (Rm.9002 A-dong, Yeoeuido Park Center28-3 Yeoeuido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
권영진 (서울시 영등포구 여의도동 28-3 여의도파크센터 A동 9002호, 150-010 Seoul, 150-010, KR)
권영진 (서울시 영등포구 여의도동 28-3 여의도파크센터 A동 9002호, 150-010 Seoul, 150-010, KR)
Application Number:
KR2010/002411
Publication Date:
October 28, 2010
Filing Date:
April 19, 2010
Export Citation:
Assignee:
ADRM TECHNOLOGIES CO., LTD. (Rm.703 World Meridian Biz Center, 15-1 Yangpyeongdong 3-ga Yeongdeungpo-gu, Seoul 150-103, 150-103, KR)
에이디알엠테크놀로지(주) (서울시 영등포구 양평동3가 15-1 월드메르디앙비즈센터 703호, 150-103 Seoul, 150-103, KR)
KWON, Young Jin (Rm.9002 A-dong, Yeoeuido Park Center28-3 Yeoeuido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
에이디알엠테크놀로지(주) (서울시 영등포구 양평동3가 15-1 월드메르디앙비즈센터 703호, 150-103 Seoul, 150-103, KR)
KWON, Young Jin (Rm.9002 A-dong, Yeoeuido Park Center28-3 Yeoeuido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
International Classes:
B01J12/00; B01J19/26; B01J19/32; C01B33/107
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (1575-1, Seocho-dong Seocho-gu, Seoul 137-875, 137-875, KR)
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