REACTION DEVICE AND REACTION METHOD

WIPO Patent Application WO/2010/016424

A1

Provided are a reaction device and a reaction method to efficiently oxidize or reduce a thin film at low temperature in a short time. The reaction device is provided with a chamber (3), a holding mechanism (2) disposed in the chamber and that holds a substrate (1) on which a thin film is formed, a pH adjusting mechanism that adjusts the pH of a polar solvent, a heating mechanism that heats the polar solvent, the pH of which has been adjusted by the pH adjusting mechanism, and a supply mechanism that supplies the polar solvent heated by the heating mechanism to the substrate held in the holding mechanism. The device is characterized in that an oxidation reaction or a reduction reaction for the thin film is induced by the polar solvent that has been heated and the pH of which has been adjusted.

WO/2022/019795	METHOD AND DEVICE FOR PRODUCING A HYDROGEN PEROXIDE SOLUTION
WO/2004/079847	PHOTO-CATALYTIC REACTOR
JP3699981	COMPOSITE HYDROGEN SEPARATION ELEMENT AND MODULE

HONDA YUUJI (JP)
SUZUKI MITSUHIRO (JP)
TANAKA MASAFUMI (JP)

PCT/JP2009/063576

February 11, 2010

July 30, 2009

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YOUTEC CO LTD (JP)
HONDA YUUJI (JP)
SUZUKI MITSUHIRO (JP)
TANAKA MASAFUMI (JP)

B01J19/24; B01J3/00; B01J3/02; B01J19/00; B01J19/10; C01B13/14; H01L21/316

JP2000357686A	2000-12-26
JP2005519481A	2005-06-30
JP2006282464A	2006-10-19
JP2003213425A	2003-07-30

YANASE, Mutsuyasu et al. (JP)
Mutsuyasu Yanase (JP)

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