Title:
REACTIVE SPECIES SUPPLY DEVICE AND DEVICE FOR TREATING SURFACES AND THE LIKE
Document Type and Number:
WIPO Patent Application WO/2012/002479
Kind Code:
A1
Abstract:
Disclosed are a reactive species supply device and a device for treating surfaces and the like, with which the likelihood of discharge between an electrode and a workpiece is reduced. With regard to an individual passage (81B), which is a constituent element of a plasma outlet passage provided between a discharge space (42B) and a plasma outlet port (16), a main passage is formed by an X-portion (81BX), a portion (81BZo) which is closer to the discharge space than a connection section (M) of an X-portion (81BXX) of a Z-portion (81BZ), the X-portion (81BXX), a diffuser (82B), and a slit (86) etc., and a branch passage is formed by a portion (81BZP) closer to the opposite side of the discharge space than the connection section (M) of the Z-direction portion (81BZ). An earth plate (90) is provided in a state blocking the branch passage (81BZP). Since the branch passage (81BZP) and the portion (81BZo) of the main passage are positioned on the same straight line, discharge takes place with respect to the earth plate (90), but does not easily take place with respect to a workpiece (W).
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Inventors:
HORI MASARU (JP)
KANO HIROYUKI (JP)
MORI KAZUAKI (JP)
NAKANE NOBUYUKI (JP)
WATANABE TOSHIMITSU (JP)
ISOZUMI JOJI (JP)
KANO HIROYUKI (JP)
MORI KAZUAKI (JP)
NAKANE NOBUYUKI (JP)
WATANABE TOSHIMITSU (JP)
ISOZUMI JOJI (JP)
Application Number:
PCT/JP2011/065008
Publication Date:
January 05, 2012
Filing Date:
June 30, 2011
Export Citation:
Assignee:
UNIV NAGOYA NAT UNIV CORP (JP)
NU ECO ENGINEERING CO LTD (JP)
FUJI MACHINE MFG (JP)
HORI MASARU (JP)
KANO HIROYUKI (JP)
MORI KAZUAKI (JP)
NAKANE NOBUYUKI (JP)
WATANABE TOSHIMITSU (JP)
ISOZUMI JOJI (JP)
NU ECO ENGINEERING CO LTD (JP)
FUJI MACHINE MFG (JP)
HORI MASARU (JP)
KANO HIROYUKI (JP)
MORI KAZUAKI (JP)
NAKANE NOBUYUKI (JP)
WATANABE TOSHIMITSU (JP)
ISOZUMI JOJI (JP)
International Classes:
H05H1/24; B01J19/08; B08B7/00; H01L21/304
Foreign References:
| JP2010020903A | 2010-01-28 | |||
| JP2006244835A | 2006-09-14 |
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (JP)
Central patent business corporation international patent firm (JP)
Central patent business corporation international patent firm (JP)
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Claims:
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