Title:
REACTIVE SPECIES SUPPLY DEVICE AND DEVICE FOR TREATING SURFACES AND THE LIKE
Document Type and Number:
WIPO Patent Application WO/2012/002479
Kind Code:
A1
Abstract:
Disclosed are a reactive species supply device and a device for treating surfaces and the like, with which the likelihood of discharge between an electrode and a workpiece is reduced. With regard to an individual passage (81B), which is a constituent element of a plasma outlet passage provided between a discharge space (42B) and a plasma outlet port (16), a main passage is formed by an X-portion (81BX), a portion (81BZo) which is closer to the discharge space than a connection section (M) of an X-portion (81BXX) of a Z-portion (81BZ), the X-portion (81BXX), a diffuser (82B), and a slit (86) etc., and a branch passage is formed by a portion (81BZP) closer to the opposite side of the discharge space than the connection section (M) of the Z-direction portion (81BZ). An earth plate (90) is provided in a state blocking the branch passage (81BZP). Since the branch passage (81BZP) and the portion (81BZo) of the main passage are positioned on the same straight line, discharge takes place with respect to the earth plate (90), but does not easily take place with respect to a workpiece (W).
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Inventors:
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番 国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KANO, Hiroyuki (2-3-8, Kurozasaizumi, Miyoshi-sh, Aichi 32, 〒4700232, JP)
加納 浩之 (〒32 愛知県みよし市黒笹いずみ二丁目３番地８ ＮＵエコ・エンジニアリング株式会社内 Aichi, 〒4700232, JP)
MORI, Kazuaki (19, Chausuyama, Yama-machi, Chiryu-sh, Aichi 86, 〒4728686, JP)
森 一明 (〒86 愛知県知立市山町茶碓山１９番地 富士機械製造株式会社内 Aichi, 〒4728686, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番 国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KANO, Hiroyuki (2-3-8, Kurozasaizumi, Miyoshi-sh, Aichi 32, 〒4700232, JP)
加納 浩之 (〒32 愛知県みよし市黒笹いずみ二丁目３番地８ ＮＵエコ・エンジニアリング株式会社内 Aichi, 〒4700232, JP)
MORI, Kazuaki (19, Chausuyama, Yama-machi, Chiryu-sh, Aichi 86, 〒4728686, JP)
森 一明 (〒86 愛知県知立市山町茶碓山１９番地 富士機械製造株式会社内 Aichi, 〒4728686, JP)
Application Number:
JP2011/065008
Publication Date:
January 05, 2012
Filing Date:
June 30, 2011
Export Citation:
Assignee:
National University Corporation Nagoya University (1 Furo-cho, Chikusa-ku Nagoya-sh, Aichi 01, 〒4648601, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
NU Eco Engineering Co., Ltd. (2-3-8, Kurozasaizumi Miyoshi-sh, Aichi 32, 〒4700232, JP)
ＮＵエコ・エンジニアリング株式会社 (〒32 愛知県みよし市黒笹いずみ二丁目３番地８ Aichi, 〒4700232, JP)
FUJI MACHINE MFG. CO., LTD. (19 Chausuyama, Yama-machi Chiryu-sh, Aichi 86, 〒4728686, JP)
富士機械製造株式会社 (〒86 愛知県知立市山町茶碓山１９番地 Aichi, 〒4728686, JP)
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番 国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KANO, Hiroyuki (2-3-8, Kurozasaizumi, Miyoshi-sh, Aichi 32, 〒4700232, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
NU Eco Engineering Co., Ltd. (2-3-8, Kurozasaizumi Miyoshi-sh, Aichi 32, 〒4700232, JP)
ＮＵエコ・エンジニアリング株式会社 (〒32 愛知県みよし市黒笹いずみ二丁目３番地８ Aichi, 〒4700232, JP)
FUJI MACHINE MFG. CO., LTD. (19 Chausuyama, Yama-machi Chiryu-sh, Aichi 86, 〒4728686, JP)
富士機械製造株式会社 (〒86 愛知県知立市山町茶碓山１９番地 Aichi, 〒4728686, JP)
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番 国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
KANO, Hiroyuki (2-3-8, Kurozasaizumi, Miyoshi-sh, Aichi 32, 〒4700232, JP)
International Classes:
H05H1/24; B01J19/08; B08B7/00; H01L21/304
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (Nagoya-Bldg. Higashikan 7th Floor, 2-25 Meieki 4-chome, Nakamura-ku, Nagoya-sh, Aichi 02, 〒4500002, JP)
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