REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT

Title:

REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT

Document Type and Number:

WIPO Patent Application WO2006053231

Kind Code:

A3

Abstract:

Systems and methods are provided for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. Exemplary systems include a novel thermal reaction chamber design having stacked porous ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems may further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.

Inventors:

CHIU HO-MAN RODNEY (US)
CLARK DANIEL O (US)
CRAWFORD SHAUN W (US)
JUNG JAY J (US)
TODD LEONARD B (US)
VERMEULEN ROBBERT (US)

Application Number:

PCT/US2005/040960

Publication Date:

November 23, 2006

Filing Date:

November 12, 2005

Export Citation:

Click for automatic bibliography generation Help

Assignee:

APPLIED MATERIALS INC (US)

International Classes:

F23G7/06; F23J9/00; F23M5/08

Foreign References:

EP0694735A1	1996-01-31
EP1143197A1	2001-10-10
US20040161718A1	2004-08-19
EP1431657A1	2004-06-23
EP0809071A1	1997-11-26
US6234787B1	2001-05-22
EP0802370A2	1997-10-22
US4392821A	1983-07-12

Other References:

PATENT ABSTRACTS OF JAPAN vol. 1997, no. 09 30 September 1997 (1997-09-30)
PATENT ABSTRACTS OF JAPAN vol. 014, no. 536 (M - 1052) 27 November 1990 (1990-11-27)
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 02 31 March 1995 (1995-03-31)
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 20 10 July 2001 (2001-07-10)

Download PDF:

View/Download PDF PDF Help

Previous Patent: SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR MANAGING PARAMETRIC AND OTHER OBJECTS

Next Patent: DOG HARNESS