Title:
REACTOR MADE OF CARBON
Document Type and Number:
WIPO Patent Application WO/2010/016133
Kind Code:
A1
Abstract:
A reactor made of carbon which is to be used for conducting the vapor-phase reaction of chlorosilane with hydrogen at high temperatures. It is characterized by comprising a reaction vessel and, disposed in the vessel, a packing member which is made of carbon and forms a gas passage for disturbing a flow of a gas mixture of chlorosilane and hydrogen, the surface of the packing member made of carbon being coated with a silicon carbide film.
Inventors:
YUBUNE, Kazuyuki (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
湯舟 和之 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
KOBAYASHI, Mineto (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
小林 峯登 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
湯舟 和之 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
KOBAYASHI, Mineto (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
小林 峯登 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
Application Number:
JP2008/064237
Publication Date:
February 11, 2010
Filing Date:
August 07, 2008
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA (1-1 Nihonbashi-Muromachi 2-chome, Chuo-ku Tokyo, 38, 10383, JP)
電気化学工業株式会社 (〒38 東京都中央区日本橋室町二丁目１番１号 Tokyo, 10383, JP)
YUBUNE, Kazuyuki (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
湯舟 和之 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
KOBAYASHI, Mineto (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
電気化学工業株式会社 (〒38 東京都中央区日本橋室町二丁目１番１号 Tokyo, 10383, JP)
YUBUNE, Kazuyuki (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
湯舟 和之 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
KOBAYASHI, Mineto (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
International Classes:
C01B33/107; B01J12/00; C04B41/87; C23C16/42
Attorney, Agent or Firm:
SONODA, Yoshitaka et al. (SONODA & KOBAYASHI, 53rd FloorShinjuku Mitsui Building,1-1, Nishi-Shinjuku 2-chome,Shinjuku-ku, Tokyo 53, 16304, JP)
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