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Title:
REAL-TIME MICROSCOPIC MONITORING SYSTEM FOR NITRIDE MOCVD EPITAXIAL GROWTH MODE
Document Type and Number:
WIPO Patent Application WO/2019/144975
Kind Code:
A1
Abstract:
A microscopic imaging system for growth mode real-time monitoring of an epitaxial thin film during nitride MOCVD epitaxial growth, said system comprising an observation window (4), an imaging lens set (5), a CCD camera (6), an image capture card (7) and an image display (8). The observation window (4) is located at the top of a graphite carrier (2) in an MOCVD reaction chamber, and the observation window (4) uses a relatively thick quartz lens to prevent the temperature within the reaction chamber from transferring and damaging the lens. Growth information of an epitaxial wafer (3) is transferred to the imaging lens set (5) having a refractive and reflective design via the observation window (4) made from the quartz lens. The imaging lens set (5) uses the special refractive and reflective design means to control the longitudinal volume of light rays, thereby reducing system aberration, ensuring imaging clarity, and reducing the size of the imaging system. The optical magnification of the imaging lens set (5) is 10 times, an image of the monitored epitaxial wafer (3) is amplified 10 times when received by the CCD camera, the image is transferred to the image display via the image capture card, and the image having a resolution greater than 1um is observed in the image display. The microscopic imaging system has a resolution greater than 1um, can distinguish 2D growth and 3D growth modes, is capable of observing whether epitaxial wafers have spiral dislocations, and observes the growth modes of MOCVD epitaxial wafers in real time during growth.

Inventors:
WANG, Chao (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
GOU, Xueke (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
JIANG, Jing (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
HU, Jun (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
ZHANG, Zezhan (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
YANG, Yang (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
DUAN, Ying (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
WU, Congjun (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
WANG, Yueming (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
Application Number:
CN2019/079372
Publication Date:
August 01, 2019
Filing Date:
March 22, 2019
Export Citation:
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Assignee:
UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA (No.4, Section 2 North Jianshe Roa, Chengdu Sichuan 0, 610000, CN)
International Classes:
G02B21/04; C23C16/00; G02B17/08; G02B21/36
Foreign References:
CN108254912A2018-07-06
CN107267964A2017-10-20
CN103592284A2014-02-19
CN103257436A2013-08-21
CN101738714A2010-06-16
CN103034069A2013-04-10
US9433967B22016-09-06
US20050152027A12005-07-14
Attorney, Agent or Firm:
CHANGSHA CHUWEI INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (Room 1706, Technology And Finance Mansion Lugu Enterprises Plaza, No.27, Wenxuan Road, High-tech,Zon, changsha Hunan 5, 410205, CN)
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