Title:
RECIPE CREATION DEVICE FOR USE IN SEMICONDUCTOR MEASUREMENT DEVICE OR SEMICONDUCTOR INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/117103
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.
Inventors:
FUJITA HIROMI (JP)
KAWAHARA TOSHIKAZU (JP)
OTA YOSHIHIRO (JP)
SUKEGAWA SHIGEKI (JP)
KAWAHARA TOSHIKAZU (JP)
OTA YOSHIHIRO (JP)
SUKEGAWA SHIGEKI (JP)
Application Number:
PCT/JP2015/051756
Publication Date:
July 28, 2016
Filing Date:
January 23, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01B15/00; H01L21/66
Foreign References:
| JP2002323458A | 2002-11-08 | |||
| JP2004095657A | 2004-03-25 | |||
| JP2009038117A | 2009-02-19 | |||
| JP2013062508A | 2013-04-04 | |||
| JP2010514226A | 2010-04-30 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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