Title:
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, PROCESSING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/186649
Kind Code:
A1
Abstract:
According to one embodiment, provided is technology that includes: a step for displaying a recipe editing screen which includes a recipe editing area in which is displayed a subject recipe including a plurality of steps, a sub-area in which is displayed at least file information relating to the subject recipe, and a command selection area in which are displayed icons for editing, on the sub-area and/or the recipe editing area, each file used in recipe editing; a step for, upon reception of a file information selection instruction in the sub-area, reading the subject recipe and the file relating to the subject recipe and dividing the sub-area into a plurality of sub-screens to open and display the read file relating to the subject recipe; and a step for editing the subject recipe displayed in the recipe editing area in accordance with an instruction received in one of the recipe editing area, the sub-area or the command selection area.
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Inventors:
KOYAMA YOSHITAKA (JP)
MITSUI HIROYUKI (JP)
MITSUI HIROYUKI (JP)
Application Number:
PCT/JP2018/012155
Publication Date:
October 03, 2019
Filing Date:
March 26, 2018
Export Citation:
Assignee:
KOKUSAI ELECTRIC CORP (JP)
International Classes:
H01L21/02
Foreign References:
| JP2014067936A | 2014-04-17 | |||
| JP2011134931A | 2011-07-07 |
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