Title:
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
Document Type and Number:
WIPO Patent Application WO2007133701
Kind Code:
A9
Abstract:
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
Inventors:
BUFANO MICHAEL L (US)
GILCHRIST ULYSSES (US)
FOSNIGHT WILLIAM (US)
HOFMEISTER CHRISTOPHER (US)
BABBS DANIEL A (US)
MAY ROBERT C (US)
GILCHRIST ULYSSES (US)
FOSNIGHT WILLIAM (US)
HOFMEISTER CHRISTOPHER (US)
BABBS DANIEL A (US)
MAY ROBERT C (US)
Application Number:
PCT/US2007/011443
Publication Date:
January 17, 2008
Filing Date:
May 11, 2007
Export Citation:
Assignee:
BROOKS AUTOMATION INC (US)
BUFANO MICHAEL L (US)
GILCHRIST ULYSSES (US)
FOSNIGHT WILLIAM (US)
HOFMEISTER CHRISTOPHER (US)
BABBS DANIEL A (US)
MAY ROBERT C (US)
BUFANO MICHAEL L (US)
GILCHRIST ULYSSES (US)
FOSNIGHT WILLIAM (US)
HOFMEISTER CHRISTOPHER (US)
BABBS DANIEL A (US)
MAY ROBERT C (US)
International Classes:
B65B5/04
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