Title:
REDUCED-PRESSURE DRYING DEVICE AND REDUCED-PRESSURE DRYING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/135018
Kind Code:
A1
Abstract:
Provided are a reduced-pressure drying device and a reduced-pressure drying method whereby a coating film can be dried in a stable manner, even when a vacuum pump for reducing pressure of a chamber section has been increased in capacity. Specifically, a reduced-pressure drying device for drying a coating film coated on a substrate in a reduced-pressure environment, wherein are provided a chamber section having a substrate-accommodating part in which a substrate is accommodated, and a suction pressure-reducing section for reducing the pressure in the substrate-accommodating part by suctioning the substrate-accommodating part, the chamber section having a reduced-pressure adjusting part for limiting the pressure-reducing rate of the suction pressure-reducing section to adjust the substrate-accommodating part to a predetermined pressure by supplying a gas to the substrate-accommodating part.
Inventors:
OKAMOTO SHUNICHI (JP)
ISHIWATARI TORU (JP)
ISHIWATARI TORU (JP)
Application Number:
PCT/JP2017/001177
Publication Date:
August 10, 2017
Filing Date:
January 16, 2017
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
F26B5/04; B05C9/12; F26B21/10
Foreign References:
| JP2006194577A | 2006-07-27 | |||
| JP2015191880A | 2015-11-02 | |||
| JP2006261379A | 2006-09-28 |
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