Title:
REFLECTION-CHARACTERISTIC MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/094559
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a compact reflection-characteristic measurement system capable of measuring, with high accuracy, the reflection characteristics of light on a surface of a sample. In order to achieve the purpose, on the basis of a first characteristic value according to the reflection characteristics of light in a correction region disposed around a first opening section in an integrating sphere, which is acquired in accordance with a signal outputted from a detection unit while a reference object is placed so as to cover an opening for measurement in the integrating sphere, and a second characteristic value according to the reflection characteristics of light in the correction region, which is acquired in accordance with a signal outputted from the detection unit while a sample is placed so as to cover the opening for measurement, a conversion rule based on which the second characteristic value can be converted to the first characteristic value is set. Through conversion based on the conversion rule, a two-dimensional distribution of reflection characteristics of the sample in a two-dimensional region, which is acquired in accordance with the signal outputted from the detection unit while the sample is placed so as to cover the opening for measurement, is corrected.
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Inventors:
YAMADA MASAYUKI (JP)
Application Number:
PCT/JP2016/084552
Publication Date:
June 08, 2017
Filing Date:
November 22, 2016
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
G01N21/27; G01J3/50
Foreign References:
| US20150198522A1 | 2015-07-16 | |||
| JP2015132596A | 2015-07-23 | |||
| JP2002320232A | 2002-10-31 | |||
| JPH1172388A | 1999-03-16 | |||
| JP2007198983A | 2007-08-09 | |||
| JP2015014590A | 2015-01-22 | |||
| JP2005037137A | 2005-02-10 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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