Title:
REFLECTION ELECTRODE AND AL ALLOY SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2018/038067
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide, to an element such as an organic EL display or an organic EL illumination, a reflection electrode having a high reflectivity while a driving voltage therefor is sufficiently reduced. The present invention pertains to a reflection electrode which is formed of a transparent conductive film and a reflection film made of an Al alloy and which is characterized in that: a main surface of the reflection film is in contact with a main surface of the transparent conductive film; and the Al alloy contains Zn and a rare earth element such that the ratio of Zn is 3-12 atom% and the ratio of the rare earth element is 0.01-0.5 atom%.
Inventors:
TAUCHI YUKI
HINO AYA
HINO AYA
Application Number:
PCT/JP2017/029839
Publication Date:
March 01, 2018
Filing Date:
August 22, 2017
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/06; H05B33/26; C23C14/14; C23C14/34; H01L51/50; H05B33/10
Domestic Patent References:
| WO2010053184A1 | 2010-05-14 | |||
| WO2014041974A1 | 2014-03-20 | |||
| WO2014080933A1 | 2014-05-30 |
Foreign References:
| JP2010192413A | 2010-09-02 | |||
| JP2005056848A | 2005-03-03 | |||
| JP2001093862A | 2001-04-06 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P.C. (JP)
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