Title:
REFRIGERATOR, COOLING TRAP
Document Type and Number:
WIPO Patent Application WO/2013/140474
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a cooling trap that uses a Stirling refrigerator. This refrigerator (14) for cooling a cooling panel (18) of a cooling trap (1) has a support member (44) attached between: an extending member (41) press-fitted to a cooling block (25) fixed to a cooling stage (23), and an upper casing (24) connected to a housing (22). A cylinder (21) is kept from bending while heat is prevented from getting into the cooling stage (23) by the extending member (41) and the support member (44).
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Inventors:
HORIUCHI HISASHI (JP)
KUDO KENJI (JP)
AOKI KAZUTOSHI (JP)
KUDO KENJI (JP)
AOKI KAZUTOSHI (JP)
Application Number:
PCT/JP2012/007105
Publication Date:
September 26, 2013
Filing Date:
November 06, 2012
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
F25B9/14
Foreign References:
| JP2004225943A | 2004-08-12 | |||
| JP2009019500A | 2009-01-29 | |||
| JP2001153478A | 2001-06-08 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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