REGENERATION CIRCULATOR, HIGH-FREQUENCY POWER SUPPLY DEVICE, AND HIGH-FREQUENCY POWER REGENERATION METHOD

Title:

REGENERATION CIRCULATOR, HIGH-FREQUENCY POWER SUPPLY DEVICE, AND HIGH-FREQUENCY POWER REGENERATION METHOD

Document Type and Number:

WIPO Patent Application WO/2016/031091

Kind Code:

A1

Abstract:

The purpose of the present invention is to suppress an excessive voltage rise of a load voltage caused by impedance mismatching on a transmission path and to regenerate high-frequency power. A configuration is used in which a parallel impedance is connected to a transmission path when voltage rises, thereby regenerating a standing wave voltage, reducing an excessive voltage of a load voltage, and improving energy use efficiency. A parallel impedance is configured with respect to a load impedance on the transmission path between a high-frequency amplifier circuit of a high-frequency power supply and a high-frequency load, thereby reducing the impedance at a connection position to suppress the occurrence of an excessive voltage on the transmission path and regenerating high-frequency power from the transmission path through the parallel impedance.

Inventors:

YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
OHMA RYOSUKE (JP)

Application Number:

PCT/JP2014/080580

Publication Date:

March 03, 2016

Filing Date:

November 19, 2014

Export Citation:

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Assignee:

KYOSAN ELECTRIC MFG (JP)

International Classes:

H02J17/00

Foreign References:

JP2013162626A	2013-08-19
JP2014003774A	2014-01-09
JP2001186062A	2001-07-06

Other References: