Title:
REGULATION PLATE, ANODE HOLDER, AND SUBSTRATE HOLDER
Document Type and Number:
WIPO Patent Application WO/2019/013111
Kind Code:
A1
Abstract:
The purpose of the present invention is to partially or locally control the thickness of a plating film on a square substrate. Provided is a regulation plate for regulating current between an anode and a square substrate. This regulation plate has: a body section having an edge part forming a square opening wherethrough the current passes; and a detachable shielding member capable of shielding at least a portion of the square opening.
Inventors:
SHIMOMURA NAOKI (JP)
NAGAI MIZUKI (JP)
NAGAI MIZUKI (JP)
Application Number:
PCT/JP2018/025622
Publication Date:
January 17, 2019
Filing Date:
July 06, 2018
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
C25D17/10; H01L21/683
Foreign References:
| JP2005029863A | 2005-02-03 | |||
| JP2013112842A | 2013-06-10 | |||
| JPH0617297A | 1994-01-25 | |||
| JP2008088522A | 2008-04-17 | |||
| JP2016127069A | 2016-07-11 |
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
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