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Title:
REHEATING COLLECTION DEVICE FOR GAS PHASE PROCESS
Document Type and Number:
WIPO Patent Application WO/2018/070284
Kind Code:
A1
Abstract:
A reheating collection device for a gas phase process is provided with: a container which extends in an axial direction along an axis and delimits a chamber; an inflow path and a gas discharge path which are connected to the chamber and arranged so as to be spaced apart from each other in the axial direction; and a heater which heats the chamber between the inflow path and the gas discharge path.

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Inventors:
OOTSUKA YUUTA (JP)
TANAKA YASUTOMO (JP)
KUBOTA WATARU (JP)
ISHIZAKI MASATO (JP)
Application Number:
PCT/JP2017/035784
Publication Date:
April 19, 2018
Filing Date:
October 02, 2017
Export Citation:
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Assignee:
IHI CORP (JP)
International Classes:
C23C16/44; B01D53/70; H01L21/205
Domestic Patent References:
WO2010140207A12010-12-09
Foreign References:
JPH08124866A1996-05-17
JP2007162108A2007-06-28
JP2003209100A2003-07-25
JP2008161863A2008-07-17
JP2016013965A2016-01-28
JP2016013966A2016-01-28
Other References:
See also references of EP 3527691A4
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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