REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT

Title:

REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT

Document Type and Number:

WIPO Patent Application WO2003078859

Kind Code:

A3

Abstract:

A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

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Inventors:

LIN JIBING
HYMES DIANE J

Application Number:

PCT/US2003/007389

Publication Date:

March 25, 2004

Filing Date:

March 10, 2003

Export Citation:

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Assignee:

LAM RES CORP (US)

International Classes:

B24B37/013; B24B37/20; B24D11/00; B29D29/00; H01L21/304; (IPC1-7): B65G15/34

Foreign References:

US5234551A	1993-08-10
US5906269A	1999-05-25
US5938007A	1999-08-17
US6000532A	1999-12-14
US6260692B1	2001-07-17

Other References: