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Title:
RELAY DEVICE USING CONDUCTIVE FLUID
Document Type and Number:
WIPO Patent Application WO/2007/026678
Kind Code:
A1
Abstract:
A relay device using a conductive fluid and having an excellent switching response is provided. The relay device is formed by bonding a semiconductor substrate to an insulator substrate, and mainly comprises a stacked layer body having an interior space, at least two contact points exposed to the interior space, a diaphragm portion facing the interior space, conductive fluid sealed in the interior space, and an actuator for elastically deforming the diaphragm portion. The diaphragm portion is provided on the semiconductor substrate, so that the drive force of the actuator necessary for elastically deforming the diaphragm portion can be reduced and the volume change of the interior space can be obtained with a fast response. This volume change causes the positional displacement of the conductive fluid in the interior space, thereby forming a conduction state or non-conduction state between the contact points.

Inventors:
YOKOYAMA, Koji (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
横山 浩司 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
UOTOME, Riichi (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
魚留 利一 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
FURUKUBO, Eiichi (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
古久保 英一 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
KAKIMOTO, Katsumi (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
Application Number:
JP2006/316946
Publication Date:
March 08, 2007
Filing Date:
August 29, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS, LTD. (1048, Oaza-Kadoma Kadoma-shi Osaka, 86, 5718686, JP)
松下電工株式会社 (〒86 大阪府門真市大字門真1048番地 Osaka, 5718686, JP)
YOKOYAMA, Koji (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
横山 浩司 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
UOTOME, Riichi (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
魚留 利一 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
FURUKUBO, Eiichi (1048, Oaza-Kadom, Kadoma-shi Osaka 86, 5718686, JP)
古久保 英一 (〒86 大阪府門真市大字門真1048番地 松下電工株式会社内 Osaka, 5718686, JP)
International Classes:
H01H57/00; H01H29/02
Foreign References:
JP2005142142A
JP2000195389A
JP2001505640A
JP2002219694A
JPS59155971A
JP2000349357A
JP2005139901A
JP2005215614A
JPS6427274A
Attorney, Agent or Firm:
NISHIKAWA, Yoshikiyo et al. (Hokuto Patent Attorneys Office, Umeda-Daiichiseimei Bldg. 5F,, 12-17, Umeda 1-chome, Kita-ku, Osaka-shi Osaka 01, 5300001, JP)
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