Title:
REPAIRING METHOD FOR MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2022/083209
Kind Code:
A1
Abstract:
A repairing method for a mask plate (1). The mask plate (1) comprises a framing-type frame (11) having an opening, a plurality of first shielding strips (14), and a plurality of mask strips (12), wherein the framing-type frame (11) comprises a left border (111) and a right border (112) opposite each other in a first direction (X), and an upper border (113) and a lower border (114) opposite each other in a second direction (Y); and the first shielding strips (14) and the mask strips (12) are fixed to the upper border (113) and the lower border (114). The repairing method comprises: identifying a mask strip deformation region (A), comprising identifying the region, in which mask strips (13) externally expand and deform in a second direction (Y), in a mask plate (1) as the mask strip deformation region (A); and replacing shielding strips, comprising stretching second shielding strips (16), replacing at least some first shielding strips (14) in the mask strip deformation region (A) with the second shielding strips (16), and connecting the second shielding strips (16) to an upper border (113) and a lower border (114) such that the externally expanding and deformed mask strips (13) retract towards the opening in the second direction (Y).
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| WO/2007/023553 | ALIGNMENT DEVICE FOR VACUUM DEPOSITION |
| WO/1999/004909 | METHOD AND APPARATUS FOR ZONE LUBRICATION OF MAGNETIC MEDIA |
Inventors:
LIU JINGTAO (CN)
Application Number:
PCT/CN2021/109402
Publication Date:
April 28, 2022
Filing Date:
July 29, 2021
Export Citation:
Assignee:
YUNGU GUAN TECH CO LTD (CN)
International Classes:
C23C14/04; C23C14/24
Foreign References:
| CN112251715A | 2021-01-22 | |||
| CN111733380A | 2020-10-02 | |||
| CN111270201A | 2020-06-12 | |||
| JP2018172758A | 2018-11-08 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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