Title:
RESIDUAL GAS AND SURFACE ION ANALYSIS SYSTEM ACCOMPANIED BY MOISTURE CONTENT MEASUREMENT USING CONDENSATION TEMPERATURE
Document Type and Number:
WIPO Patent Application WO/2022/250197
Kind Code:
A1
Abstract:
The present invention relates to a residual gas and surface ion analysis system accompanied by moisture content measurement using condensation temperature, the system comprising: a cooler that cools air to a dew point or less; a reflecting plate that is disposed on the outer peripheral surface of the cooler and is cooled by driving the cooler; and an analysis unit that is disposed opposite the reflecting plate and irradiates light onto a moisture film formed on the reflecting plate by condensation, and analyzes the moisture content and the quality and quantity of residual gas and surface ions.
Inventors:
CHOI YONG KYOO (KR)
Application Number:
PCT/KR2021/008098
Publication Date:
December 01, 2022
Filing Date:
June 28, 2021
Export Citation:
Assignee:
SUN SEMICONDUCTOR (KR)
International Classes:
G01N21/3554; G01J3/44; G01N1/22; G01N21/3504; G01N21/65
Foreign References:
| JPH11141U | 1999-11-16 | |||
| JP2006208136A | 2006-08-10 | |||
| JP6634217B2 | 2020-01-22 | |||
| US6947132B1 | 2005-09-20 | |||
| KR101654178B1 | 2016-09-05 |
Attorney, Agent or Firm:
KIM, Jung Su (KR)
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