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Title:
RESIN, COMPOSITION, CURED FILM, METHOD FOR PRODUCING CURED FILM AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/110982
Kind Code:
A1
Abstract:
Provided are: a resin which is capable of forming a cured film (a pattern) that is suppressed in warping, while having excellent film uniformity and less scum (residue); a composition which uses this resin; a cured film; a method for producing a cured film; and a semiconductor device. A resin which is selected from among polyimide precursors, polyimides, polybenzoxazole precursors and polybenzoxazoles, and which has a polymerizable group, while containing components having molecular weights of 1,000 or less in an amount of 0.005-1.0% by mass in total.

Inventors:
KAWABATA TAKESHI (JP)
IWAI YU (JP)
SHIBUYA AKINORI (JP)
Application Number:
PCT/JP2016/088305
Publication Date:
June 29, 2017
Filing Date:
December 22, 2016
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
C08G73/10; C08F290/14; C08F299/02; C08G73/22; G03F7/027; G03F7/20; H01L21/312
Domestic Patent References:
WO2013168675A12013-11-14
WO2009131189A12009-10-29
WO2015125469A12015-08-27
WO2009123122A12009-10-08
WO2010064631A12010-06-10
WO2011080992A12011-07-07
WO2014097594A12014-06-26
Foreign References:
JP2004085637A2004-03-18
JPH11209614A1999-08-03
JP2011186049A2011-09-22
JP2008038083A2008-02-21
JP2013064130A2013-04-11
JP2005003767A2005-01-06
JP2008222858A2008-09-25
JP2014088460A2014-05-15
JP2008224970A2008-09-25
JP2011079889A2011-04-21
JP2004133435A2004-04-30
JP2004026889A2004-01-29
JP2015028106A2015-02-12
JP2013256506A2013-12-26
GB1388492A1975-03-26
JPS53133428A1978-11-21
DE3337024A11985-04-25
JPS6258241A1987-03-13
JPH05281728A1993-10-29
JPH0534920A1993-02-12
US4212976A1980-07-15
JP2015087611A2015-05-07
JPS571819B21982-01-13
JPS576096B21982-02-03
US3615455A1971-10-26
JPH10291969A1998-11-04
JP4225898B22009-02-18
JP2009191179A2009-08-27
JP2001233842A2001-08-28
JP2000080068A2000-03-21
JP2006342166A2006-12-21
JP2000066385A2000-03-03
JP2004534797A2004-11-18
JP2009519904A2009-05-21
US7626957B22009-12-01
JP2010015025A2010-01-21
US20090292039A12009-11-26
US7556910B22009-07-07
JP2009221114A2009-10-01
JP2007231000A2007-09-13
JP2007322744A2007-12-13
JP2010032985A2010-02-12
JP2010185072A2010-08-26
JP2009242469A2009-10-22
JP2010262028A2010-11-18
JP2014500852A2014-01-16
JP2013164471A2013-08-22
JP2007269779A2007-10-18
JP2009191061A2009-08-27
JP4627926B22011-02-09
JPS5147334B11976-12-14
JPS57196231A1982-12-02
JPS595240A1984-01-12
JPS595241A1984-01-12
JPH02226149A1990-09-07
JPH01165613A1989-06-29
JPS5421726B11979-08-01
JPS4841708B11973-12-07
JPS5137193A1976-03-29
JPH0232293B21990-07-19
JPH0216765B21990-04-18
JPS5849860B21983-11-07
JPS5617654B21981-04-23
JPS6239417B21987-08-22
JPS6239418B21987-08-22
JP2009288705A2009-12-10
JPS506034B11975-03-10
JPS4864183A1973-09-05
JPS4943191B11974-11-19
JPS5230490B21977-08-09
JP2008292970A2008-12-04
JP2010160418A2010-07-22
JP2010129825A2010-06-10
JP4364216B22009-11-11
JPS4643946B11971-12-27
JPH0140337B21989-08-28
JPH0140336B21989-08-28
JPH0225493A1990-01-26
JPS6122048A1986-01-30
JPH1062986A1998-03-06
JP2015187211A2015-10-29
JPS63277653A1988-11-15
JPS63260909A1988-10-27
JPH01105238A1989-04-21
JP2009080452A2009-04-16
JP2006189591A2006-07-20
JP2008247747A2008-10-16
JP2007249013A2007-09-27
JP2008003581A2008-01-10
JP2012093746A2012-05-17
JP2013194205A2013-09-30
JP2013204019A2013-10-07
JP2013072935A2013-04-22
JP2013167742A2013-08-29
JP2008063554A2008-03-21
JP2013015701A2013-01-24
JP2009283711A2009-12-03
JP2011059656A2011-03-24
JP2012194520A2012-10-11
JP2014186186A2014-10-02
JP2014191002A2014-10-06
JP2014191252A2014-10-06
JP2014041264A2014-03-06
JP2011128358A2011-06-30
JP2013152381A2013-08-08
JP2011164454A2011-08-25
JP2015127817A2015-07-09
JP2011089090A2011-05-06
Other References:
WAKABAYASHI ET AL., BULL. CHEM. SOC. JAPAN, vol. 42, 1969, pages 2924
F. C. SCHAEFER ET AL., J. ORG. CHEM., vol. 29, 1964, pages 1527
J. CHEM. SOC., PERKIN TRANS., vol. II, 1979, pages 1653 - 1660
J. CHEM. SOC., PERKIN TRANS., vol. II, 1979, pages 156 - 162
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 1995, pages 202 - 232
JOURNAL OF THE ADHESION SOCIETY OF JAPAN, vol. 20, no. 7, 1984, pages 300 - 308
BROWN, H. C.; MCDANIEL, D.H.; HAFLIGER, 0.; NACHOD, F. C.: "Determination of Organic Structures by Physical Methods", 1955, ACADEMIC PRESS
DAWSON, R.M.C. ET AL.: "Data for Biochemical Research", 1959, CLARENDON PRESS
YUHO TSUNO, JOURNAL OF SYNTHETIC ORGANIC CHEMISTRY, JAPAN, vol. 23, no. 8, 1965, pages 631 - 642
M. SHIRAI; M. TSUNOOKA, PROG. POLYM. SCI., vol. 21, 1996, pages 1
MASAHIRO TSUNOOKA, POLYMER APPLICATION, vol. 46, 1997, pages 2
C. KUTAL, COORD. CHEM. REV., vol. 211, 2001, pages 353
Y. KANEKO; A. SARKER; D. NECKERS, CHEM. MATER., vol. 11, 1999, pages 170
H. TACHI; M. SHIRAI; M. TSUNOOKA, J. PHOTOPOLYM. SCI. TECHNOL., vol. 13, 2000, pages 153
M. WINKLE; K. GRAZIANO, J. PHOTOPOLYM. SCI. TECHNOL., vol. 3, 1990, pages 419
M. TSUNOOKA; H. TACHI; S. YOSHITAKA, J. PHOTOPOLYM. SCI. TECHNOL., vol. 9, 1996, pages 13
K. SUYAMA; H. ARAKI; M. SHIRAI, J. PHOTOPOLYM. SCI. TECHNOL., vol. 19, 2006, pages 81
"Japanese, Polymer Dictionary", 2005, article "Kobunshi Jiten", pages: 683 - 684
Attorney, Agent or Firm:
SIKS & CO. (JP)
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