Title:
RESIN COMPOSITION, METHOD FOR MANUFACTURING CURED FILM, SUBSTRATE WITH MULTILAYER FILM, METHOD FOR MANUFACTURING SUBSTRATE WITH PATTERN, METHOD FOR MANUFACTURING PATTERNED CURED FILM, AND METHOD FOR MANUFACTURING RESIN COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2023/243593
Kind Code:
A1
Abstract:
This resin composition comprises: a polymer having a structural unit represented by [(R2)d(R3)e(OR4)fSiOg/2] and a structural unit represented by [(R1)bMOc/2]; and a solvent having a 1-octanol/water partition coefficient log Pow of 3 or less. When a plurality of R2 are present, each independently represents an aryl group or an aralkyl group; when a plurality of R3 are present, each independently represents a hydrogen atom, a straight chain or branched aliphatic hydrocarbon group, or an aromatic hydrocarbon group; when a plurality of R4 are present, each independently represents a hydrogen atom, or a straight chain or branched aliphatic hydrocarbon group; d represents a number of 1 to 3 inclusive; e represents a number of 0 to 2 inclusive; f represents a number not less than 0 but less than 3; g represents a number more than 0 but not more than 3; and d+e+f+g=4. M represents at least one selected from the group consisting of Fe, Co, Ni, Cu, Zn, Ga, Ge, Мo, Pd, Ag, Sn, Cs, Ba, W and Hf; when a plurality of R1 are present, each independently represents a hydrogen atom, a hydroxy group, a halogen group, an alkoxy group, a straight chain or branched aliphatic hydrocarbon group, or an aromatic hydrocarbon group; b represents a number not less than 0 but less than 6; c represents a number more than 0 but not more than 6; and b+c=3 to 6.
Inventors:
MASUBUCHI TAKASHI (JP)
AOKI TAKASHI (JP)
AMEMIYA FUMIHIRO (JP)
AOKI TAKASHI (JP)
AMEMIYA FUMIHIRO (JP)
Application Number:
PCT/JP2023/021710
Publication Date:
December 21, 2023
Filing Date:
June 12, 2023
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
International Classes:
G03F7/11; C08G79/00; G03F7/20; H01L21/3065
Foreign References:
| JP2010085893A | 2010-04-15 | |||
| JP2017224819A | 2017-12-21 | |||
| JP2009244722A | 2009-10-22 |
Attorney, Agent or Firm:
HAYAMI Shinji (JP)
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