RESIN STAMPER FOR USE IN NANOIMPRINTING AND NANOIMPRINTING APPARATUS USING SAME

Title:

RESIN STAMPER FOR USE IN NANOIMPRINTING AND NANOIMPRINTING APPARATUS USING SAME

Document Type and Number:

WIPO Patent Application WO/2012/014962

Kind Code:

A1

Abstract:

A resin stamper (10) which is for use in nanoimprinting and which is provided with a microstructure layer (2) on a light -transmitting substrate (1), said microstructure layer (2) being made of a polymer prepared from a resin composition comprising: a main component that consists of a silsesquioxane derivative having multiple polymerizable functional groups; a polymerizable resin component that has multiple polymerizable functional groups and that is other than the silsesquioxane derivative; and a photopolymerization initiator. Further, the resin stamper (10) is characterized in that the content of the photopolymerization initiator is 0.3 to 3% by mass relative to the total mass of the silsesquioxane derivative and the polymerizable resin component, and the microstructure layer (2) transmits a ray of light having a wavelength of 365nm at a ratio of 80% or more.

Inventors:

ISHII Satoshi (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石井　聡之 (〒92 茨城県日立市大みか町七丁目１番１号　株式会社日立製作所　日立研究所内 Ibaraki, 〒3191292, JP)
OGINO Masahiko (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
荻野　雅彦 (〒92 茨城県日立市大みか町七丁目１番１号　株式会社日立製作所　日立研究所内 Ibaraki, 〒3191292, JP)
SHIZAWA Noritake (1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)

Application Number:

JP2011/067220

Publication Date:

February 02, 2012

Filing Date:

July 28, 2011

Export Citation:

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Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
ISHII Satoshi (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石井　聡之 (〒92 茨城県日立市大みか町七丁目１番１号　株式会社日立製作所　日立研究所内 Ibaraki, 〒3191292, JP)
OGINO Masahiko (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
荻野　雅彦 (〒92 茨城県日立市大みか町七丁目１番１号　株式会社日立製作所　日立研究所内 Ibaraki, 〒3191292, JP)

International Classes:

B29C59/02; B29C33/40; H01L21/027

Attorney, Agent or Firm:

ISONO Michizo (Sabo Kaikan Annex 7-4, Hirakawa-cho 2-chome, Chiyoda-k, Tokyo 93, 〒1020093, JP)

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Claims:

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