Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESIST COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2004/042475
Kind Code:
A1
Abstract:
A resist composition, characterized in that it comprises (A) a fluorine-containing polymer having an acidic group being blocked with a blocking group having a cycloalkyl group, an organic group having one or more of cycloalkyl groups, a bicycloalkyl group or the like, (B) an acid generating compound capable of generating an acid by the irradiation with a light, and (C) an organic solvent. The resist composition is excellent in the transparency for a vacuum ultraviolet ray such as an F2 excimer laser and in dry etching characteristics and further can be used for forming with ease a resist pattern excellent in sensitivity, resolution, flatness, thermal resistance and the like.

Inventors:
Kawaguchi, Yasuhide c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Kaneko, Isamu c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Takebe, Yoko c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Okada, Shinji c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Yokokoji, Osamu c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Application Number:
PCT/JP2003/014158
Publication Date:
May 21, 2004
Filing Date:
November 06, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ASAHI GLASS COMPANY, LIMITED (12-1, Yurakucho 1-chome Chiyoda-ku, Tokyo, 100-8405, JP)
Kawaguchi, Yasuhide c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Kaneko, Isamu c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Takebe, Yoko c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Okada, Shinji c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
Yokokoji, Osamu c/o Asahi Glass Company (Limited 1150, Hazawa-cho, Kanagawa-k, Yokohama-shi Kanagawa, 221-8755, JP)
International Classes:
C08F8/00; C08F8/02; C08F14/18; C08F16/02; C08F16/24; C08F36/16; G03C1/492; G03F7/004; G03F7/039; H01L21/027; (IPC1-7): G03F7/039; C08F8/02; C08F16/02; C08F16/24; H01L21/027
Domestic Patent References:
WO2001098834A1
Foreign References:
US20010038969A1
JP2001181346A
JP2003140349A
JP2003255544A
JP2003155540A
Other References:
See also references of EP 1580600A1
Attorney, Agent or Firm:
Senmyo, Kenji (Torimoto Kogyo Bldg, 38 Kanda-Higashimatsushitach, Chiyoda-ku Tokyo, 101-0042, JP)
Download PDF: