Title:
RESISTANCE STRUCTURE OF SERIES RESISTORS OF ESD DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/095507
Kind Code:
A1
Abstract:
Disclosed is a resistance structure of series resistors of an ESD device. A polysilicon resistor (1) is divided into N small parts, and each small part is connected to an upper metal layer (4/5) via a corresponding Contact (2) and a corresponding Via (3); the Contact (2) and Via (3) corresponding to each of the small parts and the upper metal layer connected thereto form an independent unit; the Via (3) and the upper metal layer are made of an aluminum metal material; and the Contact (2) is made of an aluminum metal material or an aluminum alloy material. By utilizing the heat capacity characteristics of the aluminum metal and ingeniously utilizing an existing structure, the resistors will not be damaged by the heat generated by the same ESD current passing therethrough, and meanwhile, the overall size of a circuit where the ESD device is positioned can be greatly reduced.
Inventors:
YIKE LI (CN)
NIE LI (CN)
NIE LI (CN)
Application Number:
PCT/CN2017/118588
Publication Date:
May 23, 2019
Filing Date:
December 26, 2017
Export Citation:
Assignee:
ENERGY INTERNET RESEARCH INSTITUTE，TSINGHUA UNIV (CN)
International Classes:
H01L23/64
Foreign References:
| CN101221950A | 2008-07-16 | |||
| US20050266651A1 | 2005-12-01 | |||
| US9105502B2 | 2015-08-11 |
Attorney, Agent or Firm:
CHENGDU JIUDINGTIANYUAN INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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