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Title:
RESISTANCE-TYPE MULTI-STAGE PRESSURE SENSOR, PRESSURE SENSING METHOD, AND APPLICATION
Document Type and Number:
WIPO Patent Application WO/2022/166394
Kind Code:
A1
Abstract:
Disclosed is a resistance-type multi-stage pressure sensor, comprising a pressure substrate and a supporting substrate, which are relatively arranged in parallel, wherein the pressure substrate is provided with a first electrode layer; the supporting substrate is provided with a second electrode layer; a dielectric layer is provided between the first electrode layer and the second electrode layer; a first wire connection area of the first electrode layer and a second wire connection area of the second electrode layer are respectively electrically connected to an external resistance measurement circuit; a first conductive path and a second conductive path are arranged in an intersecting manner at a certain angle, and an overlapping area of the paths forms a pressure sensing unit; an overlapping area of a first conductive channel and a second conductive channel forms a pressure sensing node; and when all pressure sensing units are subjected to different pressure levels, the pressure sensing units are turned on stage by stage as the pressure levels change, thereby resulting in a multi-stage stepped resistance change, so as to measure a pressure. Further disclosed are a pressure sensing method and an application. By means of the present invention, sensitive sensing of converting a pressure into a multi-stage resistance is effectively realized under different pressures.

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Inventors:
QIU YU (CN)
HU ZHONGYING (CN)
Application Number:
PCT/CN2021/136719
Publication Date:
August 11, 2022
Filing Date:
December 09, 2021
Export Citation:
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Assignee:
RET EQUIPMENT INC (CN)
International Classes:
G06F3/041; G06F3/045
Foreign References:
CN112860111A2021-05-28
CN102214037A2011-10-12
CN103823592A2014-05-28
CN106293192A2017-01-04
US20190187855A12019-06-20
Attorney, Agent or Firm:
ZHEJIANG KG IP LAW FIRM (CN)
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