Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESISTANCE-VARIABLE NONVOLATILE MEMORY ELEMENT, AND RESISTANCE-VARIABLE NONVOLATILE MEMORY DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2020/136974
Kind Code:
A1
Abstract:
This resistance-variable nonvolatile memory element (20) comprises: a first electrode (2); a second electrode (4); and a resistance-variable layer (3) disposed between the first electrode (2) and the second electrode (4) and having a resistance value reversibly varied on the basis of an electrical signal applied between the electrodes. The resistance-variable layer (3) has: a first resistance-variable layer (3c) composed of an oxygen-deficient first metal oxide comprising a first metal element and oxygen; and a second resistance-variable layer (3d) which is composed of an oxygen-deficient composite oxide comprising a first metal element, a second metal element other than the first metal element, and oxygen, and having an oxygen deficiency different from that of the first metal oxide. The oxygen deficiency of the composite oxide is smaller than the oxygen deficiency of the first metal oxide, and the oxygen diffusion coefficient of the composite oxide at room temperature is smaller than the oxygen diffusion coefficient of a second metal oxide at room temperature, the second metal oxide comprising a first metal element and oxygen, and having an oxygen deficiency equal to the oxygen deficiency of the composite oxide.

More Like This:
Inventors:
YASUHARA RYUTARO
FUJII SATORU
MIKAWA TAKUMI
HIMENO ATSUSHI
NISHIO KENGO
MIYAZAKI TAKEHIDE
AKINAGA HIROYUKI
NAITOH YASUHISA
SHIMA HISASHI
Application Number:
PCT/JP2019/030901
Publication Date:
July 02, 2020
Filing Date:
August 06, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PANASONIC SEMICONDUCTOR SOLUTIONS CO LTD (JP)
International Classes:
H01L21/8239; H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
WO2012042897A12012-04-05
Foreign References:
JP2014531749A2014-11-27
JP2006005313A2006-01-05
JP2014082477A2014-05-08
JP2016015397A2016-01-28
Attorney, Agent or Firm:
NII, Hiromori et al. (JP)
Download PDF: