Title:
EROSION/CORROSION RESISTANT BARRIER COATING
Document Type and Number:
WIPO Patent Application WO/2018/085866
Kind Code:
A3
Abstract:
Disclosed are barrier coatings for fused silica components used in semiconductor processing. In particular, the present disclosure concerns protective substrate-barrier coatings composed of corrosion-resilient metal compounds which provide superior resistance to erosion/corrosion when a coated substrate is subjected to the acidic environments at elevated temperatures typical for semiconductor processing.
Inventors:
HALL MATTHEW M (US)
KEENAN TIMOTHY (US)
PLACEK LANA MARGARET (US)
KROON SCOTT MICHAEL (US)
HALLIGAN WILLIAM SEAN (US)
FERRARO MICHAEL EDWARD (US)
KEENAN TIMOTHY (US)
PLACEK LANA MARGARET (US)
KROON SCOTT MICHAEL (US)
HALLIGAN WILLIAM SEAN (US)
FERRARO MICHAEL EDWARD (US)
Application Number:
PCT/US2017/068178
Publication Date:
June 14, 2018
Filing Date:
December 22, 2017
Export Citation:
Assignee:
CONAX TECH (US)
ALFRED UNIV (US)
ALFRED UNIV (US)
International Classes:
C23C14/06; C23C14/08; C23C16/34
Foreign References:
| US20140043592A1 | 2014-02-13 | |||
| US20020011211A1 | 2002-01-31 | |||
| US20160108512A1 | 2016-04-21 | |||
| US7604906B1 | 2009-10-20 | |||
| US20060228897A1 | 2006-10-12 |
Other References:
See also references of EP 3532650A4
Attorney, Agent or Firm:
WHEELOCK, Bryan K. (US)
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