Title:
RESISTIVE HEATERS AND USES THEREOF
Document Type and Number:
WIPO Patent Application WO2002059936
Kind Code:
A3
Abstract:
A metallic resistive heater includes an electrically conductive metallic component (330) (i.e., has low resistivity) and an oxide, nitride, carbide, and/or boride derivative of the metallic component (330) that is electrically insulating (i.e., has high resistivity). The resistivity is controlled in part by controlling the amount of oxide, nitride, carbide, and boride formation during the deposition of the metallic component and the derivative.
Inventors:
ABBOTT RICHARD C (US)
MAGNANT GARY P (US)
GLENN WILLIAM A (US)
MAGNANT GARY P (US)
GLENN WILLIAM A (US)
Application Number:
PCT/US2001/044594
Publication Date:
February 06, 2003
Filing Date:
November 28, 2001
Export Citation:
Assignee:
THERMOCERAMIX LCC (US)
ABBOTT RICHARD C (US)
MAGNANT GARY P (US)
GLENN WILLIAM A (US)
ABBOTT RICHARD C (US)
MAGNANT GARY P (US)
GLENN WILLIAM A (US)
International Classes:
H05B3/20; B22C9/06; B22D17/22; B29C45/73; C23C4/02; C23C4/06; C23C4/10; C23C4/12; C23C16/46; F26B13/04; H01L21/00; H01L21/31; H05B3/00; H05B3/10; H05B3/12; H05B3/14; H05B3/68; B21B27/08; F27D1/16; (IPC1-7): H05B3/22
Foreign References:
| US3922386A | 1975-11-25 | |||
| US5039840A | 1991-08-13 | |||
| US5616263A | 1997-04-01 |
Other References:
See also references of EP 1346607A4
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