RESONANCE DEVICE - MURATA MANUFACTURING CO

Title:

RESONANCE DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/102872

Kind Code:

A1

Abstract:

Provided is a resonance device which is capable of maintaining a vacuum in a vibration space, while suppressing increase in the product height. This resonance device is provided with: a resonator which comprises a lower electrode, an upper electrode and a piezoelectric film that is formed between the lower electrode and the upper electrode; an MEMS device which comprises an upper cover that is arranged so as to face the upper electrode of the resonator and a lower cover that is arranged so as to face the lower electrode of the resonator and to seal the resonator together with the upper cover; and a CMOS device which is mounted on a surface of the upper cover or the lower cover, said surface being on the reverse side of the surface that faces the resonator. The CMOS device has a CMOS layer and a protective layer which is provided on a surface of the CMOS layer, said surface being on the reverse side of the surface that faces the resonator; and the upper cover or the lower cover, which is bonded to the CMOS device, has a through electrode that electrically connects the CMOS device and the resonator to each other.

Inventors:

UMEDA KEIICHI (JP)
OKAWA TADAYUKI (JP)
KAMOTO TAKU (JP)

Application Number:

PCT/JP2018/041673

Publication Date:

May 31, 2019

Filing Date:

November 09, 2018

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)

International Classes:

H03H9/24; B81B7/02; B81C3/00; H03B5/32

Domestic Patent References:

WO2016158056A1

2016-10-06

Foreign References:

JP2001028516A	2001-01-30
US20140145244A1	2014-05-29
JP2013129055A	2013-07-04
US7442570B2	2008-10-28
US9114977B2	2015-08-25

Other References: