Title:
RESONANT CAVITY-BASED TERAHERTZ DEVICE, AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2021/004183
Kind Code:
A1
Abstract:
The present invention relates to a resonant cavity-based terahertz wave modulator and a manufacturing method for same, applicable to terahertz wave modulation. The resonant cavity-based terahertz wave modulator consists of a reflective layer, a base layer, a conductive layer, metal gratings, and an electrode, and the layers are arranged in parallel and immediately adjacent. The reflective layer is a metal coating layer, the base layer provides physical support to a device, the conductive layer is located below the metal gratings, and the metal gratings have a sub-wavelength structure. The electrode is disposed on the conductive layer, and used to electrically connect a power supply. The resonant cavity-based terahertz wave modulator provided by the present invention changes the conductivity of the conductive layer between the metal gratings by means of voltage adjustment and control, and realizes depth and multi-frequency modulation of terahertz waves by means of an a non-oscillating electric field enhancement effect of the metal gratings and a resonant cavity structure, thereby overcoming the drawbacks and shortcomings of the prior art. The modulator has advantages of a large modulation depth, a fast modulation speed, low energy consumption, multi-band frequency modulation, and a simple manufacturing process.
Inventors:
SUN YIWEN (CN)
LIU XUDONG (CN)
HUANG JIALIANG (CN)
LIU XUDONG (CN)
HUANG JIALIANG (CN)
Application Number:
PCT/CN2020/092793
Publication Date:
January 14, 2021
Filing Date:
May 28, 2020
Export Citation:
Assignee:
UNIV SHENZHEN (CN)
International Classes:
G02F1/17
Foreign References:
| CN110346997A | 2019-10-18 | |||
| CN108181736A | 2018-06-19 | |||
| CN108563040A | 2018-09-21 | |||
| CN105204190A | 2015-12-30 | |||
| CN104466617A | 2015-03-25 | |||
| CN108563043A | 2018-09-21 | |||
| CN107885007A | 2018-04-06 | |||
| CN107065233A | 2017-08-18 | |||
| CN103117316A | 2013-05-22 | |||
| US20080315216A1 | 2008-12-25 |
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY(SHENZHEN) (CN)
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