Title:
RESONANT THIN FILM LAYER, RESONATOR AND FILTER
Document Type and Number:
WIPO Patent Application WO/2020/238286
Kind Code:
A1
Abstract:
Provided in the present application are a resonant thin film layer, a resonator and a filter; the resonant thin film layer comprises a first electrode layer disposed on a first wafer, a piezoelectric layer disposed on the first electrode layer, a second electrode layer disposed on the piezoelectric layer, an adjustable layer disposed on the second electrode layer, and a counterweight pattern which is implemented on the adjustable layer and disposed on the second electrode layer, and which is used for adjusting different weights of the counterweight pattern so as to adjust different working frequencies of the resonant thin film layer of a resonant thin film. The present application achieves the adjustment of the counterweight pattern of the resonant thin film layer according to needs, which thus enables different resonant thin film layers to have different working frequencies.
Inventors:
LIN ZHIDONG (CN)
HSIEH HSIANG-CHENG (CN)
LUO JIE (CN)
CHU CHING-FANG (CN)
YANG JIUUN-JER (CN)
HSIEH HSIANG-CHENG (CN)
LUO JIE (CN)
CHU CHING-FANG (CN)
YANG JIUUN-JER (CN)
Application Number:
PCT/CN2020/075501
Publication Date:
December 03, 2020
Filing Date:
February 17, 2020
Export Citation:
Assignee:
XIAMEN SANAN INTEGRATED CIRCUIT CO LTD (CN)
International Classes:
H03H9/54; H03H3/02; H03H9/17
Foreign References:
| CN110190826A | 2019-08-30 | |||
| CN102160284A | 2011-08-17 | |||
| CN108173528A | 2018-06-15 | |||
| CN108173528A | 2018-06-15 | |||
| CN107181472A | 2017-09-19 | |||
| CN103701425A | 2014-04-02 | |||
| CN104242864A | 2014-12-24 |
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