Title:
RESONATOR, ELECTRONIC COMPONENT AND RESONANT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/186168
Kind Code:
A1
Abstract:
The present application belongs to the technical field of micro-electro-mechanical systems. Disclosed are a resonator, an electronic component and a resonant system. The resonator comprises a first sub-resonator and a plurality of second sub-resonators, wherein the first sub-resonator deforms in at least two non-parallel directions during vibration; the first sub-resonator is connected to the second sub-resonators in the at least two non-parallel directions; and the deformations in the at least two non-parallel directions can make the first sub-resonator be coupled to the second sub-resonators. Therefore, the resonator can give consideration to both a Q value and Rm, and can have a relatively high Q value and relatively low Rm; in addition, at the design stage, a TCF turnover temperature of the resonator can be designed according to requirements, thereby realizing the customization of the TCF turnover temperature.
Inventors:
SUN FENGPEI (CN)
FENG ZHIHONG (CN)
XU JINGHUI (CN)
HUANG LINHAI (CN)
FENG ZHIHONG (CN)
XU JINGHUI (CN)
HUANG LINHAI (CN)
Application Number:
PCT/CN2023/085909
Publication Date:
October 05, 2023
Filing Date:
April 03, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| US20200407218A1 | 2020-12-31 | |||
| CN113114149A | 2021-07-13 | |||
| US20190222196A1 | 2019-07-18 | |||
| CN215896718U | 2022-02-22 | |||
| US20180219529A1 | 2018-08-02 |
Attorney, Agent or Firm:
BEIJING SAN GAO YONG XIN INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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