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Patent Searching and Data


Title:
RESONATOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/258334
Kind Code:
A1
Abstract:
A resonator and a preparation method therefor. The resonator comprises a silicon substrate (1), a bottom electrode (3) stacked on part of the silicon substrate (1), a piezoelectric layer (4) covering the bottom electrode (3) and part of the silicon substrate (1), and a top electrode (5) and a Bragg reflection ring (6) stacked on the piezoelectric layer (4). The Bragg reflection ring (6) is provided on the surface, connected to the top electrode (5), of the piezoelectric layer (4), and the Bragg reflection ring (6) is disposed around the top electrode (5). The Bragg reflection ring (6) comprises Bragg high-resistance layers (61) and Bragg low-resistance layers (62) which are alternately arranged in the radial direction of the Bragg reflection ring (6), wherein the acoustic impedance of the Bragg high-resistance layers (61) is greater than that of the Bragg low-resistance layers (62). The Bragg high-resistance layer (61) and the Bragg low-resistance layer (62) have different acoustic impedances. The Bragg reflection ring (6) with high acoustic impedance and low acoustic impedance can generate a plurality of reflection surfaces, transversely-propagated clutters can be partially reflected on the reflection surfaces, and the reflected clutters cancel each other out, so that a parasitic mode on a working interval is inhibited, a frequency response curve of the resonator is improved, filtering is reduced, and the overall performance of the resonator is improved.

Inventors:
CHENG SHIYANG (CN)
WU KE (CN)
LI YANG (CN)
WANG CHAO (CN)
Application Number:
PCT/CN2019/093920
Publication Date:
December 30, 2020
Filing Date:
June 28, 2019
Export Citation:
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Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECHNOLOGIES PTE LTD (SG)
International Classes:
H03H9/02
Foreign References:
CN109257026A2019-01-22
CN104104357A2014-10-15
CN107525610A2017-12-29
CN109889181A2019-06-14
CN109756201A2019-05-14
US20180274127A12018-09-27
Attorney, Agent or Firm:
SHENZHEN CIPRUN INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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