Title:
RESONATOR AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2011/001680
Kind Code:
A1
Abstract:
In a resonator using the MEMS technology, accuracy of the electrode shape can be improved, the short circuit between the input and the output can be avoided, and the reliability of the resonator can be improved.
A resonator is provided with a substrate (101), an insulation layer (102) which is a sacrificial layer selectively formed on the substrate (101), a beam (103) formed on the substrate (101) with a gap therebetween, a first support portion (104A) formed on the insulation layer (102) by the same material as the beam (103), and an electrode (106) formed to have a gap from the beam (103) for inputting/outputting a signal, wherein in the cross section perpendicular to the longitudinal direction of the beam (103), the cross-sectional area of the beam (103) is substantially equal to the cross-sectional area of the first support portion (104A).
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Inventors:
KAMIYAMA TOMOHIDE
IWASAKI TOMOHIRO
YAMAKAWA TAKEHIKO
NAKAMURA KUNIHIKO
ONISHI KEIJI
IWASAKI TOMOHIRO
YAMAKAWA TAKEHIKO
NAKAMURA KUNIHIKO
ONISHI KEIJI
Application Number:
PCT/JP2010/004321
Publication Date:
January 06, 2011
Filing Date:
June 30, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
KAMIYAMA TOMOHIDE
IWASAKI TOMOHIRO
YAMAKAWA TAKEHIKO
NAKAMURA KUNIHIKO
ONISHI KEIJI
KAMIYAMA TOMOHIDE
IWASAKI TOMOHIRO
YAMAKAWA TAKEHIKO
NAKAMURA KUNIHIKO
ONISHI KEIJI
International Classes:
H03H9/24; B81B3/00; B81C1/00; H03H3/007
Foreign References:
JP2007005909A | 2007-01-11 | |||
JP2008206140A | 2008-09-04 | |||
JP2007312373A | 2007-11-29 | |||
JPH06310029A | 1994-11-04 |
Attorney, Agent or Firm:
OGURI, Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
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