RESONATOR AND RESONANCE DEVICE

WIPO Patent Application WO/2017/203757

A1

Fluctuation in the temperature characteristics of the resonance frequency is suppressed in a step for adjusting resonance. The invention has: a base; a first electrode and a second electrode; and a piezoelectric film provided between the first electrode and the second electrode, said film having an upper surface that faces the first electrode, and said film vibrating in a prescribed vibration mode when a voltage is applied between the first and second electrodes. The invention further has a vibration arm, one end of which being a fixed end connected to the front end of the base, and the other end of which being an open end extending in the direction heading away from the front end. The invention is provided with: a protection film that is provided facing the top surface of the piezoelectric film with the first electrode therebetween, said film being provided to span from the vibration arm to the base; and a temperature characteristics adjustment film comprising a material different from that of the protective film, the temperature characteristics adjustment film being provided so that a portion of the protective film is exposed on a surface on the base and/or further to the fixed end side than the center in the direction in which the vibrating arm extends in the plurality of vibration arms.

INOUE YOSHIHISA (JP)
NISHIMURA TOSHIO (JP)
TAKEYAMA KEISUKE (JP)
KAWAI RYOTA (JP)
GOTO YUICHI (JP)

PCT/JP2017/005609

November 30, 2017

February 16, 2017

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MURATA MANUFACTURING CO (JP)

H03H9/24; B81B3/00; H01L41/113; H01L41/187; H03H9/02

WO2015041152A1

2015-03-26

JP2011223371A	2011-11-04
JP2010220193A	2010-09-30
JP2012065293A	2012-03-29

INABA, Yoshiyuki et al. (JP)

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