Title:
RESONATOR AND RESONANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/008480
Kind Code:
A1
Abstract:
In order to avoid the resonance frequency from being affected by the charge on an insulator layer on a holding unit, this resonator is provided with: a vibration unit which has a piezoelectric film and a lower electrode and upper electrode provided oppositely of each other with the piezoelectric film interposed therebetween and which vibrates at a prescribed vibration mode; a holding unit which is provided at least around the maximum-displacement region, where displacement of vibration in the vibration unit is maximal, and which has an insulation film; a holding arm which connects the vibration unit and the holding unit; and a conducting section which is formed in contact with the insulation film of the holding unit in at least the region of the holding unit opposite of the maximum displacement region of the vibration unit, wherein the conducting unit is either electrically connected to the lower or the upper electrode, or is grounded.
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Inventors:
GOTO YUICHI (JP)
FUKUMITSU MASAKAZU (JP)
FUKUMITSU MASAKAZU (JP)
Application Number:
PCT/JP2017/023622
Publication Date:
January 11, 2018
Filing Date:
June 27, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/24
Foreign References:
| JP2007060484A | 2007-03-08 | |||
| JP2012065293A | 2012-03-29 | |||
| JP2003101362A | 2003-04-04 | |||
| JP2002009578A | 2002-01-11 | |||
| JP2000036723A | 2000-02-02 | |||
| JP2013066109A | 2013-04-11 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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