Title:
RESONATOR AND RESONANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/215036
Kind Code:
A1
Abstract:
The present invention comprises: a vibration part having a base part having a front end and a rear end facing the front end, and a plurality of vibration arms, fixed ends of which are connected to the front end of the base part and which extend in a direction away from the front end, the plurality of vibration arms including at least one first vibration arm, and a pair of second vibration arms which are positioned on both sides in a direction intersecting the longitudinal direction of a first vibration arm group that includes the at least one first vibration arm; a holding part provided to at least a portion around the vibration part; and a holding arm, one end of which is connected to the base part, and the other end of which is connected to the holding part, wherein a plurality of the vibration parts have a piezoelectric film, and a lower electrode and an upper electrode provided facing each other with the piezoelectric film sandwiched therebetween, and connection wiring for connecting together the upper electrodes of each of the pair of second vibration arms is provided in a region of the base part and/or the holding arm.
Inventors:
HIGUCHI YOSHIYUKI (JP)
KAWAI RYOTA (JP)
INOUE YOSHIHISA (JP)
FUKUMITSU MASAKAZU (JP)
KAWAI RYOTA (JP)
INOUE YOSHIHISA (JP)
FUKUMITSU MASAKAZU (JP)
Application Number:
PCT/JP2020/042802
Publication Date:
October 28, 2021
Filing Date:
November 17, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/24
Domestic Patent References:
| WO2017064916A1 | 2017-04-20 |
Foreign References:
| JP2019165509A | 2019-09-26 | |||
| JP2012105044A | 2012-05-31 | |||
| JP2015035818A | 2015-02-19 | |||
| JP2015186019A | 2015-10-22 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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